Lutetium Oxide (Lu2O3) Sputtering Targets

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As the leading supplier of planar and rotary sputtering targets, Stanford Materials Corporation (SMC) offers innovative solutions for optimal sputtering results and an efficient coating process. We can provide various sputtering targets to fit all commercially available systems or to specific dimensions required for your particular applications. We are always looking for ways to improve our fabrication techniques in order to supply more value and better products.


Purity99.9%, 99.95%, 99.99%
ShapeDisc Targets, Plate Targets, Column Targets, Step Targets, Custom-made
SizeCircular: Diameter < 14inch, Thickness > 1mm; Block: Length < 32inch, Width < 12inch, Thickness > 1mm