Scandium Oxide (Sc2O3) Sputtering Targets

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Stanford Materials Corporation (SMC) offers a complete line of sputtering targets ranging from commercial grade to highest purity, zone refined Ultra-Pure grade. Our standard Sputtering Targets for thin film are available monoblock or bonded with dimensions and configurations up to 820 mm to work with both older sputtering devises as well as the latest process equipment. We are always looking for ways to improve our fabrication techniques in order to supply more value and better products.


Purity99.9%, 99.95%, 99.99%
ShapeDisc Targets, Plate Targets, Column Targets, Step Targets, Custom-made
SizeCircular: Diameter < 14inch, Thickness > 1mm; Block: Length < 32inch, Width < 12inch, Thickness > 1mm