Yttrium Oxide (Y2O3) Sputtering Targets

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Stanford Materials Corporation (SMC) specializes in the manufacturer of multi-component sputtering targets of optical, electronic, piezo and ferroelectric, superconductor and fuel cell materials for researchers everywhere. Our standard Sputtering Targets for thin film are available monoblock or bonded with dimensions and configurations up to 820 mm to work with both older sputtering devises as well as the latest process equipment. Quality is assured by our end-to-end quality control process, from powder synthesis, through densification, machining, bonding and full characterization.


Purity99.9%, 99.95%, 99.99%
ShapeDisc Targets, Plate Targets, Column Targets, Step Targets, Custom-made
SizeCircular: Diameter < 14inch, Thickness > 1mm; Block: Length < 32inch, Width < 12inch, Thickness > 1mm