SMC's high purity (99.99%) yttrium oxide sputtering target is available in various forms, purities, sizes, and prices, for use in semiconductor, film coating, physical vapor deposition (PVD) display, and optical applications.
| Material Type | Yttrium Oxide |
| Symbol | Y2O3 |
| Color/Appearance | White, Crystalline Solid |
| Melting Point (°C) | 2,410 |
| Sputter | RF, RF-R |
| Type of Bond | Indium, Elastomer |
| Comments | Loses oxygen; films smooth and clear. |
| Material | Size |
| Yttrium Oxide | 1.00″ Dia. x 0.125″ Thick |
| Yttrium Oxide | 1.00″ Dia. x 0.250″ Thick |
| Yttrium Oxide | 2.00″ Dia. x 0.125″ Thick |
| Yttrium Oxide | 2.00″ Dia. x 0.250″ Thick |
| Yttrium Oxide | 3.00″ Dia. x 0.125″ Thick |
| Yttrium Oxide | 3.00″ Dia. x 0.250″ Thick |
| Yttrium Oxide | 4.00″ Dia. x 0.125″ Thick |
| Yttrium Oxide | 4.00″ Dia. x 0.250″ Thick |
Our Yttrium Oxide Sputter Target is clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.
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